Provision of a 300mm Capable High Throughput Electron Beam Lithography System

The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication and high-spec nanofabrication, as well as a wide range of characterisation capabilities, housed in a purpose built, 820m2 cleanroom in the Mountbatten Complex at the University of Southampton. One of the premier cleanrooms in Europe, the Centre has a uniquely broad range of technologies, combining traditional and novel top down fabrication with state-of-the-art bottom up fabrication. This allows us to develop and produce a wide range of devices in diverse fields such as electronics, nanotechnology and bio nanotechnology and incorporate them into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis. The University is looking to procure a new 300mm capable high throughput Electron Beam Lithography (EBL) Write Tool for the Southampton Nanofabrication Centre, to be used by researchers, students, and the wider UK academic community to provide state-of-the-art nanometer scale lithography service. The instrument to be procured will directly replace a JEOL JBX9300FS which suffered a failure in 2021 (the removal of which is an optional requirement of this tender). The user base for the machine is approximately 40 users. The University is conducting this procurement using the open procedure in accordance with the requirements of the Regulations for the purpose of procuring the goods and services described in the Specification. The University proposes to enter into a Contract for up to sixteen years. This will be the maximum contract period, including any potential extensions with the successful tenderer. This contract term will comprise: The initial contract period, comprising; • A period of twelve months to cover the estimated lead time of the instrument, • A two-year warranty period, and • A four-year comprehensive service agreement Followed by • A further nine x twelve-month optional extension periods to the comprehensive service agreement, subject to the satisfactory performance and at the discretion of the University. The contract will be effective on signing. The two-year warranty period and four-year service agreement will run from the date of delivery and acceptance of the equipment, estimated to be twelve months after the commencement of the contract. Extensions, if agreed, shall run from the expiry of the initial service agreement period (year seven), if so agreed by the University. The Contract will run for a maximum of sixteen years up until September 2038 (actual date is TBC following contract award). The anticipated total value of the proposed solution including all of the extension periods shown above should be within the range of £6m to £7m excluding VAT. It is anticipated that the cost of the instrument itself and core services related to its installation and commissioning will be in the value of £4m to £5m excluding VAT. All related components, delivery, installation, commissioning, training, services, and maintenance MUST be included within the proposal. Details of current expenditure or potential future uptake are given as a guide base on past purchasing and current planning to assist you in the preparation of your Tender. They should not be interpreted as an undertaking to purchase any goods or services to any particular value and do not form part of the Contract. This procurement is not suitable for splitting into lots. The risk of dividing the requirement into Lots would render the execution of the contract excessively technically difficult, not cost effective and would undermine proper execution of the contract.